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当微谐振器的尺寸缩小到nm量级时其工作频率已达到MHz、GHz甚至更高,研究发现工作在高频段的谐振器具有非常明显的非线性行为。本文详细分析了亚微米尺寸的悬臂梁结构的非线性力学模
When the size of the microresonator is reduced to the order of nm, the operating frequency of the microresonator has reached MHz and even higher. Studies have found that the resonators operating in the high frequency band have a very significant nonlinear behavior. In this paper, the nonlinear mechanical model of submicron-sized cantilever beam structure is analyzed in detail