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用于校正波前误差的61单元分立式压电变形反射镜是61单元自适应光学系统（AO）的关键器件之一。由于系统对单元数（61单元）和变形量（±3μm）的要求超过以往曾研制的变形镜，对研制工作带来许多困难。我们从理论分析到工艺研究采取措施，使研制的变形镜成功用于AO系统实验。
The 61-unit discrete piezoelectric deformation mirror used to correct wavefront errors is one of the key components of the 61-Unit Adaptive Optical System (AO). Due to the system requirements of the number of units (61 units) and deformation (± 3μm) than the previously developed deformable mirror, the development of many difficulties. We from the theoretical analysis to process research to take measures to make the development of the deformable mirror successfully used in AO system experiments.