提出一种基于微流控技术的二维电光开关阵列装置,其基本形式为“储气层+波导层+储液层”的结构。通过气压与电润湿效应双重作用实现对光开关单元中液柱高度的控制,从而控制光路中光束的全透射和全反射以实现光的“开”和“关”。讨论了光开关的工作电压、插损和响应时间等参数。研制结果表明,该结构具有体积小、结构简单、功耗低、能实现集成化和微型化制作的特点。 A two-dimensional electro-optic switch array device based on microfluidic technology is proposed. The basic form of the device is the structure of “gas reservoir + waveguide layer + reservoir”. Through the double effect of the air pressure and the electrowetting effect, the height of the liquid column in the optical switch unit can be controlled so as to control the total transmission and the total reflection of the light beam in the optical path to realize the light on and off. Discuss the optical switch working voltage, insertion loss and response time and other parameters. The results show that the structure has the characteristics of small size, simple structure, low power consumption, integration and miniaturization.