在检验光路中,采用补偿透镜来补偿口径为φ500mm的非球面透镜的使用波长(λ=1053nm)与检测波长(λ=632.8nm)之间的色差。给出补偿透镜的求解方法,得到非球面透镜的补偿检验光路,并就非球面透镜的检验精度进行分析。通过精度分析可以看出,在此种补偿检验光路下,非球面透镜的透射波前PV不低于0.2λ(λ=632.8nm),可满足元件的精度要求。 In the test optical path, a compensating lens is used to compensate for the color difference between the used wavelength (λ = 1053 nm) and the detected wavelength (λ = 632.8 nm) of an aspherical lens having a diameter of φ500 mm. The solving method of compensating lens is given, and the compensation testing optical path of aspherical lens is obtained, and the testing accuracy of aspherical lens is analyzed. Through the analysis of accuracy, it can be seen that the transmission wave front PV of the aspherical lens is not less than 0.2λ (λ = 632.8nm) under such compensation inspection optical path, which can meet the precision requirements of the components.