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Microwave boriding layer microstructure of carbon steels and its diffusion mechanics were studied.The results show that the existence of microwave field in the boriding can’t change the growth mechanics of boriding layer. Compared with conventional boriding,if the treatment temperature and time remain constantly,the descend rate of the boriding layer thickness with the increase of carbon content of steel is smaller.The diffusion activation energy of T8 steel is 2.6× 105 J/mol between the temperature of 750 ℃and 900 ℃ in microwave field,which is in the same order ofconventional boriding.