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通过磁控溅射复合沉积方法在钛合金基体上制备了不同表面能和粗糙度的薄膜。主要研究了元素掺杂的DLC薄膜和具有仿生表面形貌的Cu膜。通过接触角测试和相应表面能计算研究了这些薄膜的润湿性能。通过XPS表征了掺杂DLC薄膜的化学键结构,通过AFM和SEM表征了Cu膜表面形貌。结果表明DLC膜中的元素掺杂减小了表面能,增强了薄膜的疏水性能,尤其是F元素的掺杂。由于F元素的掺杂使得DLC膜的接触角从65°增加到159°。材料表面形貌在其润湿性能上起着重要作用,通过仿生形貌制造,沉积到Al2O3的Cu膜水接触角从89°增加到141.7°。
The films with different surface energies and roughness were prepared on the titanium alloy substrate by magnetron sputtering deposition. The DLC thin films doped with elements and Cu films with bionic surface topography are mainly studied. The wetting properties of these films were investigated by contact angle measurements and corresponding surface energy calculations. The chemical bond structure of DLC thin films was characterized by XPS. The surface morphology of Cu films was characterized by AFM and SEM. The results show that DLC film element doping reduces the surface energy, enhance the hydrophobic properties of the film, especially the F element doping. Due to the doping of the F element, the contact angle of the DLC film is increased from 65 ° to 159 °. The surface morphology of the material plays an important role in its wetting properties. The contact angle of water deposited on the Cu film by Al2O3 is increased from 89 ° to 141.7 ° by the bionic morphology.