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对氮化铝陶瓷基片的热导率进行了实验和理论分析。结果证实,烧结初始氧含量低的氮化铝粉体,加入较多的Y2O3作烧结助剂才能获得最大热导率,并且其值较高;随着氧含量的增加,可达到的最大热导率逐渐降低,而需加入的Y2O3量减少。同时,晶间相的存在对热导率有重要影响。文中推导出热导率与氧含量和Y2O3添加量之间的定量关系式并指出,获得最大热导率必须使用氧含量低的陶瓷粉本,同时根据氧含量的大小来确定Y2O3的添加量。
The thermal conductivity of AlN ceramic substrate was experimentally and theoretically analyzed. The results show that the maximum initial thermal conductivity can be obtained by adding more Y2O3 as a sintering aid to the sintered aluminum nitride powder with lower initial oxygen content. The maximum thermal conductivity achievable with increasing oxygen content The rate gradually decreased, and the amount of Y2O3 to be added decreased. Meanwhile, the existence of intergranular phase has an important influence on thermal conductivity. The quantitative relationship between thermal conductivity and oxygen content and Y2O3 addition is deduced. It is pointed out that the ceramic powder with low oxygen content must be used to obtain the maximum thermal conductivity, and the Y2O3 addition amount should be determined according to the oxygen content.