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利用射频磁控溅射仪制备W2N/Cu薄膜,采用高温摩擦磨损试验机、X射线衍射、扫描电镜和Bruker三维形貌仪对摩擦磨损性能及磨痕的相结构、形貌进行表征,采用“绝热法”定量计算了薄膜磨痕处所含物相的相对含量。实验表明,W2N/Cu薄膜的摩擦系数受环境温度的影响不明显;而磨损率和磨痕处产生的氧化物相对含量均随环境温度增加逐渐变大。分析表明,W2N/Cu薄膜的摩擦系数主要与磨痕中具有减摩作用的氧化相的量有关;而其磨损率主要与磨痕中具有层状结构的氧化相的量有关。
W2N / Cu thin films were prepared by RF magnetron sputtering. The tribological properties and the phase structure and morphology of the wear scar were characterized by high temperature friction and wear testing machine, X-ray diffraction, scanning electron microscopy and Bruker three-dimensional profilometer. “Adiabatic method” quantitatively calculated the relative content of the phase content of the film wear scar. The experimental results show that the friction coefficient of W2N / Cu film is not affected by the ambient temperature. However, the wear rate and the relative content of oxide produced at the wear scar gradually increase with the increase of ambient temperature. The results show that the friction coefficient of W2N / Cu film is mainly related to the amount of oxidized phase with anti-friction effect in the wear scar. The wear rate is mainly related to the amount of oxidized phase with lamellar structure in the wear scar.