介绍了彩色CCD的器件结构和成像原理,采用彩色光刻胶光刻法实现了彩色滤光片的制备,并通过分析彩色滤光片缓冲层、滤光片厚度和固化工艺等对滤光片性能的影响,获得了彩色滤光片的片上集成技术,并将其集成在512×512帧转移CCD器件上,完成了性能评价与成像验证。测试结果表明:制备的彩色滤光片主线透过率大于80%,光谱串扰小于15%,色纯度大于75%,集成该滤光片的彩色CCD成像色彩空间与sRGB相当,能够满足大多数CCD相机彩色成像的要求。 The device structure and imaging principle of color CCD are introduced. The color filter lithography is used to fabricate the color filter. By analyzing the color filter buffer layer, filter thickness and curing process, Performance, the color filter on-chip integration technology, and integrated into the 512 × 512 frame transfer CCD devices, the completion of the performance evaluation and imaging verification. The results show that the main line transmittance of the prepared color filter is more than 80%, the spectral crosstalk is less than 15% and the color purity is more than 75%. The color CCD integrated with this filter has the same color space as sRGB and can satisfy most CCD Camera color imaging requirements.