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Plasma-polymerization of octafluorocyclobutane was carried out in a capacitively coupled tubu-lar reactor with external electrodes. The number-average molecular weight, melting temperature,decomposition temperature and solubility in te trafluorodibromoethane of the products was mea-sured and the polymer structure was characterized by ESR. IR and ~(1)9F-NMR methods. The experi-mental results show the absence of the highly crosslinked structure but a fluorine-deficient structurecaused by free-radicals, carbonyl groups. double bonds and multicage-like segments in the polymer.