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采用磁控溅射离子镀技术制备了一组不同Cr含量的碳基离子镀层,利用XRD、SEM、TEM、XPS及Raman光谱对镀层的微观结构进行了表征,并分析了微观结构对镀层的力学性能及摩擦学性能的影响。实验结果表明:随着Cr含量的增加,碳基镀层从典型的非晶结构转变为纳米晶/非晶复合结构,sp2杂化键含量逐渐增加,sp3杂化键含量逐渐减少,并且碳基镀层的硬度和内应力均随着Cr含量的增加而呈现减小的趋势。微量的金属Cr掺杂可有效地降低镀层的摩擦系数和比磨损率。过量的Cr掺杂虽有利于sp2杂化键含量的提高,但金属相的弥散分布导致了碳基镀层摩擦系数和比磨损率的增大,摩擦学性能变差。
A series of Cr-based carbon-based coatings were prepared by magnetron sputter ion plating. The microstructures of the coatings were characterized by XRD, SEM, TEM, XPS and Raman spectroscopy. The effects of microstructure on the mechanical properties of the coatings Effect of performance and tribological properties. The experimental results show that with the increase of Cr content, the carbon-based coating changes from a typical amorphous structure to a nanocrystalline / amorphous composite structure, the sp2 hybridization bond content gradually increases, the sp3 hybridization bond content gradually decreases, and the carbon- Both the hardness and internal stress showed a decreasing tendency with the increase of Cr content. Trace metal Cr doping can effectively reduce the coating friction coefficient and specific wear rate. Excessive Cr doping is beneficial to the increase of sp2 hybridization content, but the dispersion of the metallic phase leads to the increase of the friction coefficient and the specific wear rate of the carbon-based coating and the poor tribological properties.