论文部分内容阅读
为减少子孔径拼接干涉检测中机械精度引起的定位误差对检测结果造成的影响,在一般的调整误差拼接算法上加入机械定位误差的补偿项,建立了补偿机械误差的综合优化方法。针对参考面未知的拼接干涉检测,研究了应用极大似然估计法拟合出用Zernike多项式表示参考面面形分布的方法,在除去参考面面形后采用补偿机械误差的算法拼接。模拟对比实验表明,在相同的机械精度下,机械误差补偿算法得到的全口径相位差异分布均方根(RMS)值减少到近一般调整误差拼接法的1/6,机械误差补偿算法拼接精度高于一般调整误差拼接法。在搭建的拼接检测装置上检测口径为280mm的平面镜,与大口径干涉仪检测的全口径相位差异分布的峰谷(PV)值为0.099 4λ,RMS值为0.006 8λ,验证了综合优化方法在重构参考面面形基础上能有效补偿机械定位误差。
In order to reduce the influence of the positioning error caused by the mechanical precision in the detection of the sub-aperture splicing interference on the detection result, the compensation term of the mechanical positioning error is added to the general adjustment error stitching algorithm, and a comprehensive optimization method for compensating the mechanical error is established. Aiming at the splicing interference detection with unknown reference surface, the method of applying maximum likelihood estimation to fit the distribution of reference surface with Zernike polynomial is studied. After the reference surface is removed, the algorithm is used to compensate the mechanical error. The simulation experiment shows that under the same mechanical precision, the root mean square (RMS) value of the full-aperture phase difference distribution obtained by the mechanical error compensation algorithm is reduced to 1/6 of that of the general adjustment error stitching method, and the mechanical error compensation algorithm has high stitching precision In the general adjustment error stitching method. The plane mirror with the diameter of 280mm was detected on the spliced detection device. The peak-to-valley (PV) value of the phase difference of the full aperture detected by the large-aperture interferometer was 0.099 4λ and the RMS value was 0.006 8λ. The reference surface can effectively compensate the mechanical positioning error.