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利用石英钟罩式微波等离子体化学气相沉积 ( MWPCVD)实验装置 ,研究了硅基体表面沉积金刚石薄膜时纳米碳管对金刚石形核过程的影响。扫描电子显微镜 ( SEM)形貌分析结果显示 ,纳米碳管处理能够促进金刚石形核。对非研磨基体而言 ,这是一种有效的增强金刚石形核的表面预处理方式。
The influence of carbon nanotubes on the nucleation of diamond was investigated by using a diamond bell-type microwave plasma chemical vapor deposition (MWPCVD) device. Scanning electron microscopy (SEM) morphology analysis results show that carbon nanotube treatment can promote diamond nucleation. For non-abrasive substrates, this is an effective surface preparation for diamond nucleation.