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近十余年来,由于各种科学技术的需要,超高真空技术得到了很大的发展。与此同时,在超高真空技术中出现的问题也越来越多。在超高真空的获得方面,各种抽气泵工作原理的物理机构还不很清楚,这使得设计效率更高、极限气压更低的抽气泵遇到困难。在测量方面,目前还没有完善的方法;就应用最广的B-A型电离真空计而言,各种因素的影响也仍然了解得很肤浅。从超高真空物理的角度来看,这些问题一般都涉及到表面效应,大致可归结为吸附、扩散、离子轰击、表面反应等几方面。有关这些
In the recent ten years, due to the needs of various science and technology, ultra-high vacuum technology has been greatly developed. At the same time, there are more and more problems in UHV technology. The physical mechanism of the working principle of various suction pumps is still unclear in the field of obtaining ultra-high vacuum, which makes the design efficiency higher and the pump with lower limit pressure encounters difficulties. In terms of measurement, there is no perfect method at present; in terms of the most widely used B-A ionization gauge, the influence of various factors is still very superficial. From the perspective of ultra-high vacuum physics, these problems generally involve the surface effect, which can be roughly summarized as adsorption, diffusion, ion bombardment and surface reaction. About these