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详细分析了一种基于二维正交光栅衍射的同步移相干涉测量系统的组成结构,包括干涉系统、空间分光部件、偏振移相部件以及图像采集与处理系统。选择了二维正交透射光栅的四个衍射级次的光束作为测试光,理论和实验都证明这种方案具有良好的分光效果;用偏振方向依次改变45°的四片偏振片构成偏振阵列作为移相器件,并根据空间一致性要求,分割得到依次具有90°移相的四幅独立干涉图,获得了较高的移相精度;在幅频积低于100 Hzλ的振动环境中,系统测量重复性的峰谷值优于0.02λ,可以用于一般的在线检测和动态测量。
The composition of a system for simultaneous phase-shifting interferometry based on two-dimensional orthogonal grating diffraction is analyzed in detail. The system consists of an interference system, a space-splitting component, a polarization phase-shifting component and an image acquisition and processing system. Four beams of diffraction order of two-dimensional orthogonal transmission grating are selected as the test light. Both theoretical and experimental results show that this scheme has a good spectral effect. Four polarizing plates whose polarizing direction is changed by 45 ° in sequence are used to form a polarizing array. Phase-shifting devices. According to the requirement of spatial consistency, four independent interferograms with 90 ° phase shift in turn are obtained, and high phase-shifting accuracy is obtained. In the vibration environment where the amplitude-frequency product is less than 100 Hzλ, the system measurement is repeated The peak-to-peak value is better than 0.02λ and can be used for general on-line and dynamic measurements.