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MEMS的可靠性是其能否成功应用的一个关键。本文对MEMS可靠性测试的要求与可靠性测试系统ShiMMeR进行了分析,通过对MEMS的可靠性实验与失效模型的综述,对MEMS的可靠性设计进行了探讨。
The reliability of MEMS is a key to its successful application. In this paper, the requirements of MEMS reliability test and reliability test system ShiMMeR are analyzed. The reliability design of MEMS is discussed through the review of reliability test and failure mode of MEMS.