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在移相法测量光学波面或物体形貌过程中,相位解包裹是条纹自动分析中的关键技术,而质量图对解包裹相位算法起着至关重要的作用。用计算机模拟干涉图获得相位导数偏差质量图,指出其在标识相位数据质量方面的不足,并根据调制度结合相位梯度构造出新的质量图(称之为调制度-相位梯度偏差质量图)来弥补此缺陷。再以新质量图数据为权值,采用加权最小二乘解包裹算法验证新质量图的可靠性。最后通过实验数据,比较新质量图和相位导数偏差质量图在解包裹相位算法中的作用,得到新质量图的解相结果均方根(RMS)值为2.652 rad,而相位导数偏差质量图的解相结果均方根值为5.151 rad,由此证明前者有更好的可靠性。
In the process of phase-shift measurement of optical wavefront or object topography, phase unwrapping is the key technology in automatic streak analysis, and the quality map plays a crucial role in unwrapping phase algorithm. Computer simulation of interferogram to obtain the phase derivative of the deviation of the mass map, pointed out its lack of identification phase data quality, and in accordance with the degree of modulation combined with the phase gradient to create a new quality map (called modulation - phase gradient quality map) Make up for this flaw. Then the weight of the new quality map data is used to verify the reliability of the new quality map by using weighted least squares solution. Finally, the experimental data were used to compare the effect of the new mass map and the phase derivative deviation mass map in the unwrapping phase algorithm. The root mean square (RMS) value of the new mass map was 2.652 rad, while that of the phase derivative deviation map The root mean square value of the solution phase is 5.151 rad, which proves the former has better reliability.