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使用等离子清洗机对六层刚挠结合板进行处理。首先采用单因素分析法确定了工艺中各参数(因素)不同水平对试验指标的影响趋势,并为正交试验的水平选择确定了范围,再运用正交试验得到的优化方法,对清洗后的孔壁进行了热应力等相关试验。结果证明采用优化的工艺参数后,清洗孔壁有较好的孔金属化效果。最佳工艺参数为CF4流量100 cm3/min、O2流量250 cm3/min、处理功率4 000 W、处理时间35 min。等离子清洗后进行二次黑孔化工艺,结果证明黑孔化工艺能够应用于六层刚挠结合板制作。
A six-layer rigid-flex panel was machined using a plasma cleaner. First of all, using univariate analysis to determine the process of the various parameters (factors) the impact of different levels on the experimental indicators trends, and to determine the scope of the orthogonal selection of the level, and then use the orthogonal test to optimize the method of cleaning Hole wall thermal stress and other related tests. The results show that the use of optimized process parameters, the cleaning hole wall has better hole metallization effect. The optimum process parameters were CF4 flow rate of 100 cm3 / min, O2 flow rate of 250 cm3 / min, treatment power of 4 000 W and treatment time of 35 min. After the plasma cleaning secondary black hole process, the results prove that the black hole process can be applied to rigid-flex board with six layers of production.