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研究了一种钽靶材织构评价方法模型,关注{100}、{110}、{111}三种面织构的组份含量和分布均匀性,并对三种织构进行了定义,规定晶界角度定义为≤2°,组份含量取与标准织构取向差小于15°的晶粒的百分含量;同时,对取样方法与测试方法进行了规定,依据本模型,可通过织构分布折线图、15°取向图和IPF图来对钽靶材单点与整靶织构分布情况进行综合评价。
A method for evaluating the texture of a tantalum target texture was studied, focusing on the component content and distribution uniformity of {100}, {110}, {111} three-plane texture and defining three kinds of texture, The grain boundary angle is defined as ≤2 °, the content of the component is taken as the percentage of the grains with the difference of orientation of the standard texture less than 15 °; at the same time, the sampling method and the testing method are stipulated. According to this model, Distribution line chart, 15 ° orientation chart and IPF chart to make a comprehensive evaluation of the distribution of tantalum target point and the whole target texture.