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设计了一套测试装置,扩展了扫描电镜/波谱仪的功能。既能作试样的形貌和成份分析,又能对发光器件进行发光颜色和发光强度的测量。
A test set has been designed to extend the capabilities of the SEM / spectrometer. Both for the morphology and composition of the sample analysis, but also luminous devices luminous color and luminous intensity measurements.