一、简单原理与应用特点图1为扫描型电子显微镜(以下简称为扫描电镜)的结构概图。由电子枪发射的电子束被阳极加速后,经2～3段电子透镜聚焦,最终变成几百埃以下的电子束。当此电子束照射到被检样品时,则在受照部分产生信号(二次电子、反射电子、阴极发光,内部电势等),这些信号经检出、放大后成为显示用的阴极射线管亮度调节的输入功率。当电子束由偏转线圈在样品上产生的光栅扫描与阴极射线管的射线扫描同步时,则与电视成像原理相同,便得 First, the simple principle and application characteristics Figure 1 is a scanning electron microscope (hereinafter referred to as scanning electron microscopy) structure diagram. After the electron beam emitted by the electron gun is accelerated by the anode, it is focused by two to three electron lenses and finally becomes an electron beam of several hundred angstroms or less. When the electron beam irradiates the sample, a signal (secondary electrons, reflected electrons, cathodoluminescence, internal potential, etc.) is generated in the irradiated portion, and these signals are detected and amplified to become cathode ray tube luminance for display Regulated input power. When the electron beam generated by the deflection yoke in the sample raster scan with the CRT scan synchronization with the ray, then with the same principle of television imaging, there will be