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为提高集成光学器件中的多线宽制作效率,提出了基于激光直接写入技术的离焦加工模式,即加工时激光束的聚焦点不落在胶层表面而是在其前方或后方;同时还建立了基于多个加工参量的线宽数学模型。此线宽模型首先假定激光束经物镜变换后,在像方任意离焦面上的能量仍保持高斯分布,其次还考虑了光束动态扫描引起的光斑线度对曝光能量分布的影响,故称其为动态高斯模型。此线宽模型涉及光功率、基片离焦量、光束扫描速度、胶层曝光能量阈值等加工参量。对线宽模型的验证在自行研发的极坐标型激光图形发生器上进行,实验表明:相对于不考虑光斑运动的静态高斯模型,动态高斯模型更为符合实验结果。
In order to improve the efficiency of multi-linewidth manufacturing in integrated optics, a defocused processing mode based on laser direct writing technology is proposed, that is, the focus point of the laser beam does not fall on the surface of the glue layer but is in front of or behind it during processing. A mathematical model of linewidth based on multiple machining parameters is also established. The linewidth model firstly assumes that the energy of the defocused surface on the image side remains the Gaussian distribution after the laser beam is transformed by the objective lens and the influence of the spot intensity caused by the beam dynamic scanning on the exposure energy distribution is also considered. For the dynamic Gaussian model. The linewidth model involves processing parameters such as optical power, substrate defocusing amount, beam scanning speed, and the energy level of the adhesive layer exposure. The verification of the linewidth model is carried out on a self-developed polar coordinate laser pattern generator. Experiments show that the dynamic Gaussian model is more in line with the experimental results than the static Gaussian model which does not consider the spot motion.