脉冲Nd:YAG激光烧蚀石墨的反应性光声谱研究

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应用脉冲宽度为400μs的自由振荡Nd:YAG激光器对石墨进行烧蚀并且检测烧蚀的反应性声谱。烧蚀声谱存在典型的双峰结构并且该声谱与光声腔长度无明显关系。烧蚀程度越大,与烧蚀相关的烧蚀声峰衰减越强烈,烧蚀声峰的上升时间约为400μs。当光斑直径为1.10mm时,激光能量从320mJ下降到150mJ,烧蚀声峰下降时间从3 ms上升到8 ms,石墨的烧蚀光能约为65mJ。烧蚀声峰值与光能量成正比。EMS分析烧蚀斑表明石墨的气化导致了烧蚀声谱的双峰结构和在烧蚀孔的内表面上有与光束正交的波纹状表面。 Graphite was ablated using a free-running Nd: YAG laser with a pulse duration of 400 μs and the ablated reactive sonography was detected. There is a typical bimodal structure in the ablation spectrum and the acoustic spectrum has no obvious relationship with the length of the photoacoustic cavity. The greater the degree of ablation, the more intense ablation attenuation associated with ablation is and the rise time of the ablation peak is about 400 μs. When the spot diameter is 1.10mm, the laser energy is decreased from 320mJ to 150mJ, the peak of ablation peak rises from 3ms to 8ms, and the ablation energy of graphite is about 65mJ. Ablation sound peak is proportional to light energy. EMS analysis of ablation spots showed that the gasification of graphite resulted in a bimodal structure of the ablation spectrum and a corrugated surface orthogonal to the beam on the inner surface of the ablation hole.
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