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ZnO作为典型的直接带隙宽禁带半导体材料具有丰富的形貌结构和独特的物理、化学性能,被广泛应用于能源、信息技术、生物医学等领域.目前纳米结构的精确设计与可控制备已成为改善ZnO基功能型纳器件性能的重要手段.本论文介绍了利用图案化技术对ZnO纳米结构进行限域生长的技术手段,重点综述了光刻技术和激光干涉模板法在精细ZnO纳米结构制备方面的研究进展,及其在光伏电池、光电化学电池、发光器件和纳米发电机四种能量转换器件中的应用.形貌结构可调的ZnO纳米结构具有分立的高精度空间纳米结构、增大的比表面积、提升的光子捕获能力,在与其他材料复合时利于实现高效的载流子行为调控,获得了高效的能量转换,满足了不同功能型纳器件对材料结构的需求.针对ZnO纳米结构精确设计所发展的一系列图案化技术对其他材料的复杂纳米结构可控制备具有重要的指导意义,亦为功能型纳器件的进一步发展开辟了一个全新的途径.
ZnO as a typical direct bandgap wide band gap semiconductor material with rich morphology and unique physical and chemical properties, is widely used in energy, information technology, biomedical fields, etc. At present, the precise design and controllable preparation of nanostructures Has become an important means to improve the performance of ZnO-based nanostructured devices.This paper introduces the use of patterning technology for the limited growth of ZnO nanostructures technical means, focusing on the lithography and laser interference template method in the fine ZnO nanostructures Research progress in preparation, and its application in four kinds of energy conversion devices such as photovoltaic cell, photoelectrochemical cell, light-emitting device and nano-generator.The ZnO nanostructures with adjustable topography and structure have discrete high-precision nanostructures in space, Large specific surface area and enhanced photon capture ability, which is conducive to efficient carrier behavior regulation when combined with other materials, and achieves efficient energy conversion to meet the needs of different functional nano-devices for the material structure.For ZnO nano A series of patterning techniques developed by precise structure design Controllable complex nanostructures of other materials Preparation has an important guiding significance, but also for the further development of functional nano devices has opened up a whole new way.