The distribution of nano-carbonitrides produced by the treatments of surface nanocrystallization and plasma electrolytic carbonitriding on a γ-TiAl was investigated by means of figure analysis. The skewness and kurtosis of Gaussian shape distribution curves were studied and the effect of electrolyte temperature was determined. The usage of lower temperatures of the electrolyte is more suitable for achieving lower sizes of complex nano-carbonitrides. The surface roughness of treated samples was measured and it was observed that there is an optimum level of electrolyte temperature for surface roughness increase (difference between two measured data).