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本文介绍了一种新型高密度低温等离子体——分布式电子回旋共振（ＤＥＣＲ）等离子体。文中利用样品架作为探针对Ａｒ，Ｈ２，Ｏ２及Ｎ２Ｏ等气体的ＤＥＣＲ等离子体特性作了定性的实验研究和分析。
This paper introduces a new type of high-density low-temperature plasma-distributed electron cyclotron resonance (DECR) plasma. In this paper, the sample rack was used as a probe to qualitatively study and analyze the DECR plasma characteristics of Ar, H2, O2 and N2O gases.