采用误差修正是提高两相非等节距时栅位移传感器精度的有效方法.首先,详细研究了两相非等节距时栅传感器的原理和误差组成,分析了长周期误差、短周期误差等误差特性.其次,提出了一种新型的谐波误差修正方法,它可以同时消除长周期误差和短周期误差,且不要求等间距采样,采样点数少,数据处理简单.最后,通过实验表明,该方法能大大提高传感器的精度. Using error correction is an effective method to improve the accuracy of two-phase non-equidistant grid displacement sensor.Firstly, the principle and error composition of two-phase non-equidistant grid sensor are studied in detail, and the long period error, short period error and so on Error characteristics.Secondly, a new harmonic error correction method is proposed, which can eliminate long-period error and short-period error at the same time, and does not require equal-pitch sampling, less sampling points and simple data processing.Finally, This method can greatly improve the accuracy of the sensor.