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为模拟辐射效应,使用增强质子背散射、SEM、TEM和显微硬度等测量手段进一步研究了He离子注入HR-1型不锈钢中的行为。离子束能量和剂量区间分别为30～170keV和10~(15)～10~(18)He~+/cm~2,靶温区为77～673K,部分样品进行了升至1323K的恒时退火实验。研究了注入He的分布特征、起泡过程、He泡结构及He的释放特性。也测量了不同剂量下注He层显微硬度的变化。
To simulate the radiation effects, the behavior of He ion implantation in HR-1 stainless steel was further studied by enhanced proton backscattering, SEM, TEM and microhardness measurements. The ion beam energy and dose interval were 30 ~ 170keV and 10 ~ (15) ~ 10 ~ (18) He ~ + / cm ~ 2, respectively, and the target temperature was 77 ~ 673K. Some samples were annealed at 1323K experiment. The distribution characteristics of He injection, the foaming process, the He bubble structure and the release characteristics of He were investigated. The changes of microhardness of He layer with different doses were also measured.