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研究了电子束、离子束作用于Al2O3表面时成分的变化，表明无论电子束或离子束都能使Al2O3发生分解，产生导电的元素Al。实验在PHI610·SAM上进行，电子束轰击下（3keV，O．5μA，入射角60°）10s就有元素Al分解出来，2min以后就达到饱和，分解析出量随时间成a（1－e－bt）的关系。离子束轰击下同样发生元素Al的分解，但当Ei＞3keV时，由于剥离速率加大，溅射5min时表面Al峰反而比1min时要弱。这时表面Al含量处于分解析出与溅射剥离的动态平衡中。实验还发现了Al2O3的解析与表面成分有关（如碳的含量）。最后讨论电子束与离子束的解析机理。
The changes of the composition of the electron beam and the ion beam on the surface of the Al2O3 have been studied. It shows that both the electron beam and the ion beam decompose the Al2O3 and produce the conductive element Al. The experiments were carried out on PHI610 · SAM. Elemental Al was decomposed by electron beam bombardment (3keV, 0.5μA, incident angle 60 °) for 10s and reached saturation after 2 minutes. The amount of precipitation and decomposition was a (1-e -bt) relationship. Under the ion beam bombardment, the same decomposition of elemental Al occurred, but when Ei> 3keV, the surface Al peak was weaker than that at 1min due to the increase of the peel rate. At this time, the surface Al content is in the dynamic balance of precipitation and sputtering stripping. Experiments also found that the resolution of Al2O3 and the surface composition (such as carbon content). Finally, the analytical mechanism of electron beam and ion beam is discussed.