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本文研究了发可见光的多孔硅薄膜及其粉末的电子顺磁共振(EPR)信号。采用不同电阻率和不同晶向的硅单晶衬底,经过不同条件的阳极氧化制成多孔硅薄膜,其光致发光峰在可见光范围,其EPR信号(标记为PK6)来自三角轴对称的自旋中心,对称轴方向是衬底晶格的〈111〉晶向。该结果说明多孔硅中保留着单晶硅成份。分析PK6的对称性及其g张量主值发现它很可能是硅悬键。多孔硅粉末的EPR信号表现为PK6信号的无规取向平均谱。
In this paper, the electron paramagnetic resonance (EPR) signals of porous silicon films and their powders were studied. Porous silicon films were fabricated by anodic oxidation under different conditions with different single crystal substrates with different resistivity and different crystal orientation. The photoluminescence peaks of the EPR signal (labeled as PK6) in the visible range were from the axisymmetric The center of rotation, the axis of symmetry, is the <111> orientation of the substrate lattice. This result shows that the monocrystalline silicon remains in the porous silicon. Analyzing the symmetry of PK6 and its principal value of g-tensor reveals that it is likely to be a silicon dangling bond. The EPR signal of porous silicon powder appears as a randomly oriented mean spectrum of PK6 signal.