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用离子束溅射和离子辅助淀积技术制备DWDM滤光片的关键问题是必须获得优良的膜层厚度均匀性。采用实验修正膜层厚度修正板的办法获得了较好的均匀性分布 ,给出了实验配置、实验方法和实验结果 ,并对实验结果作了分析讨论
The key issue with DWDM filters using ion beam sputtering and ion-assisted deposition is the need to achieve good film thickness uniformity. A better uniform distribution was obtained by experimentally modifying the film thickness correction plate. The experimental configuration, experimental methods and experimental results were given, and the experimental results were analyzed and discussed