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研究了用于声表面波滤波器的微米尺度的叉指换能器的制作工艺。利用剥离工艺,分别采用铝和铬金两种金属制作了叉指换能器的电极,分析了剥离工艺制作叉指电极时的工艺特性。对加工样品的测量分析结果表明,利用剥离工艺制备的叉指换能器电极线条光滑、陡直、清晰,但是成品率较低。对比分析了采用铝和铬金制作的叉指换能器样品结构,结果表明两种金属材料在剥离液中的腐蚀时间不同,铝材料需要较长的剥离时间;两种材料制作的电极图形质量也有差异,铝材料制作的电极更为陡直、精细。
The fabrication technology of micrometer-scale interdigital transducer used in SAW filter is studied. The electrode of the interdigital transducer was made by using two kinds of metals, aluminum and chrome gold, respectively, and the process characteristics of the interdigital electrode were analyzed. The results of the measurement and analysis of the processed samples show that the finger electrodes prepared by the lift-off process are smooth, steep and clear, but the yield is low. The structure of the interdigital transducer made of aluminum and chrome gold was comparatively analyzed. The results show that the corrosion time of the two metals in the stripping solution is different, and the aluminum material needs longer stripping time. The electrode pattern quality of the two materials There are also differences, the electrode made of aluminum material is more steep, fine.