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用真空蒸镀及自然氧化方法在玻璃基底上制备纳米量级的4、5、6、7对层的C r/C r2O3多层膜。采用称重法测定薄膜的厚度;在常温和低温下使用三点法测定多层膜的电特性;用扫描电镜(SEM)观察薄膜的表面和截面的形貌及成分;用X射线衍射仪检测相结构。结果表明:制备的是纳米量级非晶态的C r/C r2O3多层膜,在常温和低温(77K)下均具有类似负阻的特性。
The C r / C r2O3 multilayers of 4, 5, 6 and 7 pairs were prepared on glass substrates by vacuum deposition and natural oxidation. The thickness of the film was measured by weighing method. The electrical properties of the multilayer film were measured by three-point method at normal temperature and low temperature. The surface and cross-section morphology and composition of the film were observed by scanning electron microscopy (SEM) Phase structure. The results show that the nanocrystalline amorphous C r / Cr 2 O 3 multilayer films have similar negative resistance characteristics at room temperature and low temperature (77K).