A NEW FABRICATION PROCESS FOR A FLEXIBLE SKIN WITH TEMPERATURE SENSOR ARRAY AND ITS APPLICATIONS

来源 :Acta Mechanica Sinica | 被引量 : 0次 | 上传用户:zdnumber
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This paper reports a novel technique for fabrication of a flexible skin with a tempera-ture sensor array(40×1 sensors).A simplified MEMS technology using platinum resistors as sensingmaterials,which are sandwiched between two polyimide layers as flexible substrates is developed.Thetwo polyimide layers are deposited on top of a thin aluminum layer,which serves as a sacrificial layersuch that the flexible skin can be released by metal etching and peeled off easily.The flexible skin witha temperature sensor array has a high mechanical flexibility and can be handily attached on a highlycurved surface to detect tiny temperature distribution inside a small area.The sensor array shows alinear output and has a sensitivity of 7.5 mV/℃(prior to amplifiers)at a drive current of 1mA.Todemonstrate its applications,two examples have been demonstrated,including measurement of tem-perature distribution around a micro heater of a micro PCR(polymerase chain reaction)chip for DNAamplification and detection of separation point for flow over a circular cylinder.The development ofthe flexible skin with a temperature sensor array may be crucial for measuring temperature distributionon any curved surface in the fields of aerodynamics,space exploration,auto making and biomedicalapplications etc. This paper reports a novel technique for fabrication of a flexible skin with a tempera-ture sensor array (40 × 1 sensors). A simplified MEMS technology using platinum resistors as sensing materials, which are sandwiched between two polyimide layers as flexible substrates is developed. polyimide layers are deposited on top of a thin aluminum layer, which serves as a sacrificial layersuch that the flexible skin can be released by metal etching and peeled off easily. The flexible skin witha temperature sensor array has a high mechanical flexibility and can be handily attached on a highly curved surface to detect tiny temperature distribution within a small area. The sensor array shows alinear output and has a sensitivity of 7.5 mV / ℃ (prior to amplifiers) at a drive current of 1mA. demo demonstrated its applications, two examples with , including measurement of tem-perature distribution around a micro heater of a micro PCR (polymerase chain reaction) chip for DNA amplification and detections ction of separation point for flow over a circular cylinder. the development of the flexible skin with a temperature sensor array may be crucial for measuring temperature distributionon any curved surface in the fields of aerodynamics, space exploration, auto making and biomedicalapplications etc.
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