设计并制作了一种适用于原位纳米力学测试的原子力显微镜(AFM)测头.测头由光学检测系统和Z向压电陶瓷微位移机构组成.其中光学检测系统采用光杠杆与显微镜同轴光路检测探针形变,压电位移机构内置电容传感器可实现探针进给量的闭环控制.标定实验表明该测头闭环位移分辨力优于10 nm,在标定范围内具有很好的线性.利用该测头对某型微悬臂梁法向弹性常数进行了测量,测得值与采用具有溯源性的标定方法所得结果一致. An atomic force microscope (AFM) probe which is suitable for in-situ nanomechanical testing is designed and fabricated. The probe consists of an optical detection system and a Z-direction piezoelectric ceramic micro-displacement mechanism. The optical detection system uses an optical lever and a microscope The optical path detection probe deformation and the piezoelectric displacement mechanism built-in capacitive sensor can realize the closed-loop control of the probe feed rate.The calibration experiments show that the resolution of the closed-loop displacement of the probe is better than 10 nm and has good linearity in the calibration range. The probe measures the normal elastic constant of a type of micro-cantilever, and the measured value is consistent with the result obtained by using the traceable calibration method.