论文部分内容阅读
粘滞阻尼的研究对硅微机械振动陀螺仪的设计至关重要 .而品质因数的大小反映了阻尼特性 .本文首先理论分析了硅微型机械振动陀螺仪粘滞阻尼的耗能 ,然后根据耗能分析给出了驱动结构和敏感结构的品质因数 .
Viscous damping research is very important for the design of silicon micro-mechanical vibration gyroscope, while the quality factor reflects the damping characteristics.This paper first theoretical analysis of silicon micro-mechanical vibration gyro viscous damping energy consumption, and then according to the energy consumption The analysis gives the quality factor of driving structure and sensitive structure.