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本文介绍一种具有大排气量的五级金属油扩散泵的设计与调试。这种泵的主要特点是:工作压强范围宽、在较高压强下有较大抽速、最大出口压强较高。典型K-500泵的抽速是大于10000升/秒,极限压强低于6.6×10-5帕,最大前级压强大于54帕,加热功率8千瓦左右。
This article describes the design and commissioning of a five-stage metal-oil diffusion pump with a large exhaust volume. The main features of this pump are: a wide range of working pressure, a higher pumping speed at higher pressure, the maximum outlet pressure higher. Typical K-500 pump pumping speed is greater than 10000 liters / sec, the ultimate pressure is lower than 6.6 × 10-5 Pa, the maximum pressure greater than the previous stage 54 Pa, heating power of about 8 kW.