论文部分内容阅读
,Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor
【机 构】
：
School of Microelectronics, Xidian University, Xi’an 710071, China“,”Key Laboratory of Ministry of E
【出 处】
：
中国物理B（英文版）
【发表日期】
：
2009年11期
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