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分别以丙醇锆和正硅酸乙酯为原料,采用溶胶-凝胶工艺制备了性能稳定的ZrO2和SiO2溶胶。用旋转镀膜法在K9玻璃上分别制备了单层SiO2薄膜、单层ZrO2薄膜、ZrO2/SiO2双层膜和SiO2/ZrO2双层膜。采用原子力显微镜观察了薄膜的表面形貌,用椭偏仪测量薄膜的厚度与折射率,用紫外-可见光分光光度计测量了薄膜的透射率。对薄膜的透射光谱和椭偏仪模拟的数据进行分析,发现SiO2/ZrO2双层膜之间的渗透十分明显,而ZrO2/SiO2双层膜之间几乎不发生渗透。利用TFCalc模系设计软件,采用三层膜模型对薄膜的透射率进行模拟,得出的透射曲线与用紫外-可见光分光光度计测量的透射曲线十分符合。
Zirconium propoxide and orthosilicate were used as raw materials to prepare ZrO2 and SiO2 sol with stable properties by sol-gel process. Single layer SiO2 film, single layer ZrO2 film, ZrO2 / SiO2 double layer film and SiO2 / ZrO2 double layer film were prepared on K9 glass by spin coating. The surface morphology of the film was observed by atomic force microscopy. The thickness and refractive index of the film were measured by ellipsometry. The transmittance of the film was measured by UV-visible spectrophotometer. The transmission spectra of the films and the ellipsometry data were analyzed and it was found that the permeation between the SiO2 / ZrO2 bilayers was very clear, while the permeation of the ZrO2 / SiO2 bilayer films hardly occurred. Using TFCalc modular design software, a three-layer film model was used to simulate the transmittance of the film. The obtained transmission curve was in good agreement with the transmission curve measured by UV-visible spectrophotometer.