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针对红外焦平面阵列自身存在的占空比小、光能利用率低的问题,提出利用光胶技术将方形孔径球面微透镜阵列与红外焦平面集成。从理论角度分析了微透镜阵列集成的聚能效应。设计“栅线”和“十字”双对准标记,采用衍射光栅同轴对准方法实现器件的对准。经过对集成前后红外焦平面性能进行对比,发现响应率提高了近40%,探测率提高了约20%,红外焦平面的噪声从758.89μV下降到668.23μV。最终得到结论:光胶法用于两种器件的集成具有耐温性好、变形小、强度高等优点,集成后红外焦平面的探测性能显著提高,有利于探测器微小型化发展。
Aiming at the small duty cycle and low utilization of light energy of the infrared focal plane array itself, the integration of the square aperture spherical microlens array and the infrared focal plane is proposed by using the light glue technique. From the theoretical point of view, the micro-lens array integrated energy-gathering effect is analyzed. Design “grid line” and “cross” double alignment mark, the use of diffraction grating coaxial alignment method to achieve device alignment. After comparing the performance of the infrared focal plane before and after integration, it was found that the response rate increased by nearly 40% and the detection rate increased by about 20%. The infrared focal plane noise decreased from 758.89μV to 668.23μV. Finally, it is concluded that the optical glue method has the advantages of good temperature resistance, small deformation and high strength. The integrated infrared optical focal plane detection performance is significantly improved, which is conducive to the miniaturization of the detector.