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微悬臂梁是一种高灵敏度的生化传感器.论文考虑吸附表面应力引起的中性层位置的变化,采用能量法建立了微悬臂梁在单层分子吸附稳定后的静态弯曲模型,并以表面吸附有水蒸汽分子的微悬臂梁为例,研究了微悬臂梁曲率半径随其厚度、杨氏模量及吸附分子间距的变化规律以及中性层位置变化对微悬臂梁传感器性能预测的影响,结果发现:(1)微悬臂梁的曲率半径与其杨氏模量、厚度及吸附分子间距之间可以近似用一次、二次和八次函数关系表示;(2)中性层变化导致的曲率半径计算误差,随着微悬臂梁厚度、杨氏模量的增加而减小,但影响较小,而吸附分子间距会对该相对误差产生明显影响;(3)中性层位置变化会对微悬臂梁传感器灵敏度和表面应变预测产生明显的影响.
Micro-cantilever is a kind of biochemical sensor with high sensitivity.According to the change of the neutral layer’s position caused by the stress of adsorption surface, the static bending model of micro-cantilever after monolayer adsorption is established by energy method, The microcantilever with water vapor molecule as an example, the microcantilever radius of curvature changes with the thickness, Young’s modulus and the distance between the adsorbent molecules and the position of the neutral layer on micro-cantilever sensor performance prediction, the results It is found that: (1) The radius of curvature of the microcantilever can be approximated by the first, second and eighth functions as the Young’s modulus, the thickness and the distance between the adsorbed molecules; (2) The calculation of the radius of curvature caused by the change of the neutral layer The error decreases with the increase of micro-cantilever thickness and Young’s modulus, but the influence is small, while the adsorption molecular spacing will have a significant effect on the relative error. (3) Sensor sensitivity and surface strain prediction have a significant impact.