论文部分内容阅读
本文以一个实际的高精度恒温恒湿洁净室为例，在对其房间气流组织进行分析的基础上，优化了空气处理系统。系统采用了一套合理的控制方法，在满足洁净室所需高级别洁净度的同时，使洁净室的温湿度也分别达到了±０－１ ℃、±５ ％ 的设计要求，并大幅度降低了制冷机组的成本和运行费用。
In this paper, an actual high-precision constant temperature and humidity clean room as an example, based on the analysis of the air flow in the room based on the optimization of the air handling system. The system uses a set of reasonable control methods to meet the cleanliness requirements of the high level of cleanliness at the same time, the temperature and humidity of the clean room were also achieved ± 0-1 ℃, ± 5% of the design requirements, and significantly reduce The cost of refrigeration units and operating costs.