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用大功率５ｋＷＣＯ２激光器为能源，以六甲基二硅胺烷［（ＣＨ３）３Ｓｉ］２ＮＨ（简称ＨＭＤＳ）和ＮＨ３为原料，合成纳米非晶Ｓｉ／Ｃ／Ｎ复相粉体。研究了ＨＭＤＳ流量和ＮＨ３对纳米复相粉体组成的影响。ＮＨ３的加入可以大幅度降低纳米复相粉体的碳含量，提高氮含量。Ｓｉ／Ｃ／Ｎ纳米复相粉体的粒径分布范围为１０～５０ｎｍ，为非晶态。
Using high power 5kW CO2 laser as energy source, nano-amorphous Si / C / N composite powder was synthesized by using hexamethyldisilazane [(CH3) 3Si] 2NH (HMDS) and NH3 as raw materials. The effect of HMDS flow and NH3 on the composition of nanocomposite powders was investigated. The addition of NH3 can greatly reduce the carbon content of nanocomposite powders and increase the nitrogen content. The size distribution of Si / C / N nanocomposite powders ranges from 10nm to 50nm and is amorphous.