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为了改善类金刚石(DLC)膜在真空环境下的摩擦磨损性能,以满足其在航天领域的应用需求。本文通过离子注入与沉积技术制备了显微硬度高于20 GPa、膜基附着力大于200 mN的掺钨DLC膜,并探讨了该薄膜与几种常用的真空润滑油脂:聚α-烯烃(PAO,201润滑油)、全氟聚醚(Z25)、LH201、Braycote 601EF、Braycote 602EF复合润滑体系的真空摩擦学性能。结果表明:DLC基固-液复合润滑体系能够有效改善DLC膜在高真空条件下的快速失效问题,是DLC膜在高真空环境下的一种有效延寿途径。相较于601EF、602EF,DLC-LH201复合润滑体系具有更好的真空摩擦磨损性能。
In order to improve the friction and wear properties of diamond-like carbon (DLC) films under vacuum environment, the applications of DLC films in aerospace applications are needed. In this paper, tungsten-doped DLC films with microhardness of more than 20 GPa and film-based adhesion of more than 200 mN were prepared by ion implantation and deposition techniques. The properties of the films were compared with several commonly used vacuum grease: PAO , 201 oil), perfluoropolyether (Z25), LH201, Braycote 601EF, Braycote 602EF composite lubrication system of the vacuum tribological properties. The results show that the solid-liquid composite lubrication system of DLC can effectively improve the fast failure of DLC film under high vacuum and is an effective way to prolong DLC film under high vacuum environment. Compared with 601EF, 602EF, DLC-LH201 compound lubrication system has better vacuum friction and wear properties.