三氯氢硅(SiHCl_3)又称三氯甲硅烷、硅氯仿,是有机硅的卤化物,在工业生产中,制造半导体原料单晶硅的中间产物。通常出于三氯氢硅容器破裂或管道滴冒,有害气体弥散空气而中毒。这次是因三氯氢硅反应瓶加压过大,瓶内温度剧增,发生反应瓶爆炸,大量三氯氢硅液体溅出,当即引起急性中毒2人 Trichlorosilane (SiHCl_3), also known as trichlorosilane, silicon chloroform, is a halide of silicones, in the industrial production, the manufacture of semiconductor raw material monocrystalline silicon intermediate. Usually out of the trichlorosilane container rupture or pipe dripping, harmful gas dispersion of air and poisoning. This time because of trichlorosilane reaction bottle pressure is too large, the bottle temperature soared, the reaction bottle explosion, a large number of trichlorosilane liquid spilled immediately caused acute poisoning 2