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研究了分子束外延方法生长的ZnO薄膜的光学特性,首先测量样品反射光谱,然后重点研究其光致发光光谱。实验中通过改变激发光的强度,以及采用波导配置和不同的实验几何配置等手段,观察到了ZnO薄膜中起源于激子-激子散射和电子-空穴等离子体复合发光的受激辐射,同时观察到两种配置下自发辐射谱中存在巨大的差异。通过对实验数据和理论计算结果的分析,初步认为造成了从ZnO薄膜表面和侧面得到的PL谱之间的显著区别原因有两种:一是非对称薄膜波导的吸收损耗造成的波长选择效应,二是薄膜波导对掠出射光的类似薄膜微腔的微腔效应。
The optical properties of ZnO thin films grown by molecular beam epitaxy were studied. The reflection spectra of the samples were measured firstly, and then the photoluminescence spectra of the ZnO thin films were studied. By changing the intensity of the excitation light, adopting the waveguide configuration and different experimental geometries, the stimulated emission from the exciton-exciton scattering and electron-hole plasma recombination luminescence in the ZnO thin film was observed in the experiment. At the same time, It is observed that there is a huge difference in spontaneous emission spectra under both configurations. By analyzing the experimental data and theoretical calculation results, it is preliminarily considered that there are two reasons for the significant difference between the PL spectra obtained from the surface and the side of the ZnO thin film. The first is the wavelength selective effect caused by the absorption loss of the asymmetric thin film waveguide. Is a microcavity effect similar to thin film microcavity of thin film waveguide to swept out light.