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阵列波导光栅(AWG)器件是波分复用(WDM)系统的一种关键器件,其中,聚合物阵列波导光栅由于其制备工艺、器件集成等方面的优势而受到人们的日益关注。侧壁散射损耗是聚合物阵列波导光栅损耗的一个主要因素,减少阵列波导光栅波导的侧壁损耗对制备低损耗阵列波导光栅具有重要意义。一种蒸气回溶技术被用来有效地减少硅基聚合物阵列波导光栅的散射损耗,该技术的机理是饱和溶剂分子融入并软化波导侧壁,增加其流动性,从而降低波导侧壁粗糙度。用扫描电镜方法验证了用该技术能获得更光滑的波导侧壁。对直波导和阵列波导光栅样品进行回溶处理,测试后得到直波导的侧壁散射损耗减少2.1 dB/cm,阵列波导光栅中心信道和周边信道的插入损耗分别减少5.5 dB和6.7 dB,串扰减少2.5 dB。
Arrayed waveguide grating (AWG) devices are one of the key components in wavelength division multiplexing (WDM) systems. Among them, polymer arrayed waveguide gratings have attracted increasing attention due to their advantages in fabrication technology and device integration. Sidewall scattering loss is one of the main factors of the waveguide loss of the polymer array waveguide. Reducing the sidewall loss of the arrayed waveguide grating waveguide is of great significance for preparing the low-loss array waveguide grating. A vapor-recovery technique is used to effectively reduce the scattering loss of silicon-based polymer arrayed waveguide gratings. The mechanism of this technique is that saturated solvent molecules melt and soften the sidewalls of the waveguide to increase its fluidity, thereby reducing the waveguide sidewall roughness . Scanning electron microscopy confirmed the use of this technique to obtain smoother waveguide sidewalls. The backscattering loss of straight waveguide and arrayed waveguide grating samples was reduced by 2.1 dB / cm after straight waveguides. The insertion loss of central and peripheral channels of arrayed waveguide grating decreased by 5.5 dB and 6.7 dB respectively, and the crosstalk was reduced 2.5 dB.