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介绍一种使用Sawyer马达驱动的平台和表面编码器组成的精密定位系统．该平台包括一个台板和若干线性脉冲马达推动器．台板由防腐钢板制成,在其表面加工了齿牙．线性脉冲马达推动器靠空气支承悬浮在台板上,用以驱动平台．每一驱动器均由一个永久磁铁和两个驱动线圈组成,用以产生X向和Y向的平台驱动力．设计了一种表面编码器用以测量和控制平台的运动．一个正弦格栅装在台板上,一个传感组件装在平台驱动器上．在该传感组件中有三个光学传感器,用以测量三个分离点上的X和Y方向的位置,平台的θ_z向位置可以从传感器输出求得．开发了一种反馈控制系统用以控制平台运动．测量和反馈控制实验证明了该精密系统的可行性．
Introduces a precision positioning system that uses a Sawyer motor-driven platform and surface encoder. The platform includes a platen and a number of linear pulse motor pushers. The platen is made of corrosion-resistant steel and the teeth are machined on its surface. Linear pulse motor pushers rely on air bearing suspension in the platen, to drive the platform. Each drive consists of a permanent magnet and two drive coils to generate X and Y platform drive forces. A surface encoder was designed to measure and control the movement of the platform. A sine grid is mounted on the platen and a sensing unit is mounted on the platform drive. There are three optical sensors in the sensor assembly to measure the position of the X and Y directions at three separate points. The θ_z position of the platform can be obtained from the sensor output. A feedback control system was developed to control the platform motion. Measurement and feedback control experiments demonstrate the feasibility of the precision system.