【摘 要】
：
微机械单晶硅陀螺仪谐振器的结构参数设计对陀螺仪的机械性能影响很大，它决定了陀螺仪的水平和垂直方向的固有振荡频率，并影响微机械单晶硅陀螺仪谐振器的振荡幅度，因而，也直接影
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微机械单晶硅陀螺仪谐振器的结构参数设计对陀螺仪的机械性能影响很大，它决定了陀螺仪的水平和垂直方向的固有振荡频率，并影响微机械单晶硅陀螺仪谐振器的振荡幅度，因而，也直接影响微机械单晶硅陀螺仪的灵敏度。研究了微机械单晶硅陀螺仪谐振器的结构参数设计与其机械性能的关系，探讨了微机械单晶硅陀螺仪谐振器结构设计的一般原则，微机械单晶硅陀螺仪谐振器的结构参数对其动态性能有显著的影响，文中对此进行了仿真研究。
The structural parameter design of the MEMS gyroscope resonator has a great influence on the mechanical performance of the gyroscope. It determines the natural and horizontal oscillation frequency of the gyroscope and affects the performance of the MEMS gyroscope resonator Oscillation amplitude, therefore, also directly affect the sensitivity of the micromachined single-crystal silicon gyroscope. The relationship between the structural parameters of the MEMS resonator and its mechanical properties has been studied. The general principle of the structure design of the MEMS resonator has been discussed. The structural parameters of the MEMS gyroscope resonator Has a significant impact on its dynamic performance, this article has carried on the simulation research.
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