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电子器件柔性化、超薄化对柔性ITO透明导电膜需求越来越为迫切,但是由于ITO薄膜本身性质局限和柔性衬底问题,使得ITO透明导电膜的光电性能极容易受到影响。以PET柔性基材制备ITO膜为例,从ITO透明导电膜膜系结构出发,研究就ITO透明导电膜的制备工艺,对提高ITO透明导电膜的光电性能进行简要的探讨。
The demand of flexible ITO transparent conductive film is becoming more and more urgent due to the flexibility and slimness of electronic devices. However, the ITO film is easily influenced by the limitations of ITO film and flexible substrate. Taking PET flexible substrate for preparing ITO film as an example, from the structure of ITO transparent conductive film, the preparation process of ITO transparent conductive film was studied, and the photoelectric properties of ITO transparent conductive film were discussed briefly.